Effective tool design of three-rank form as precision removal-process of ITO thin-films

Pai-shan PA

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 232-237.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 232-237.
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Effective tool design of three-rank form as precision removal-process of ITO thin-films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(Special 1): 232-237

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